Optical beam steering using MEMS-controllable microlens array

被引：91

作者：

Tuantranont, A ^{[1
]}

Bright, VM ^{[1
]}

Zhang, J ^{[1
]}

Zhang, W ^{[1
]}

Neff, JA ^{[1
]}

Lee, YC ^{[1
]}

机构：

[1] Univ Colorado, Dept Mech Engn, NSF Ctr Adv Mfg & Packaging Microwave Opt & Digit, Boulder, CO 80309 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 91卷 / 03期

关键词：

microlens; beam steering; flip-chip; optical interconnects; MEMS;

D O I：

10.1016/S0924-4247(01)00609-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Novel, two-dimensional MEMS-controllable microlens array has been integrated with a vertical cavity surface emitting laser (VCSEL) array using flip-chip assembly. The MEMS/VCSEL hybrid system is built as an efficient and reliable smart pixel array for board-to-board or chip-to-chip optical interconnects in digital systems. Theory including geometrical and Fourier transform analysis and beam steering experimental results are presented. By translating polymer microlens, fabricated on a MEMS X-Y movable plate, using electro-thermal actuators, a beam steering angle of 70 mrad is achieved. VCSEL beam steering was successfully demonstrated in our MEMS/VCSEL hybrid system to collimate and steer laser beam for a precision alignment in a two-dimensional free-space optical interconnect. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：363 / 372

页数：10

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