Properties of polycrystalline SrRuO3 thin films on Si substrates

被引：37

作者：

Watanabe, K ^{[1
]}

Ami, M ^{[1
]}

Tanaka, M ^{[1
]}

机构：

[1] SONY CORP,RES CTR,HODOGAYA KU,YOKOHAMA,KANAGAWA,JAPAN

来源：

MATERIALS RESEARCH BULLETIN | 1997年 / 32卷 / 01期

关键词：

oxides; thin film; laser deposition; diffusion; electrical properties;

D O I：

10.1016/S0025-5408(96)00165-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The perovskite SrRuO3 thin films were deposited on Si(100) substrates using pulsed laser deposition. These thin films had columnar structures and exhibited good surface morphology and good barrier characteristics for Si. The films exhibited metallic conductivities, with a room temperature resistivity of 529 mu Omega . cm. These thin films can be useful in many applications, such as electrodes for ferroelectric and electro-optic devices.

引用

页码：83 / 96

页数：14

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