Relative control philosophy - balance and continual change for forecasting abnormal quality characteristics in a silicon wafer slicing process

被引:14
作者
Lin, CT
Chang, CW
Chen, CB
机构
[1] Ming Chuan Univ, Grad Inst Management Sci, Taipei, Taiwan
[2] Natl Dong Hwa Univ, Grad Inst Int Business, Hualien, Taiwan
关键词
Chinese philosophy; grey forecasting; multiple quality characteristics; process capability; quality control; silicon wafer manufacturing;
D O I
10.1007/s00170-004-2067-x
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Silicon wafer slicing is a complex manufacturing process, complicating efforts to monitor process stability and quality control effectively. However, silicon wafer slicing involves several synchronously occurring multiple quality characteristics that require close monitoring and control. Therefore, this study applies the Chinese philosophy of yin and yang to illustrate relative management and control wafer slicing quality, and provides decision makers with philosophical thoughts for balancing the simultaneous consideration of various factors. Furthermore, to increase process yield and accurately forecast the next wafer slice quality, grey forecasting is applied to constantly and closely monitor slicing machine drift and quality control.
引用
收藏
页码:1109 / 1114
页数:6
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