Properties of sputtered ZnO films and its interfaces with CdS

被引：36

作者：

Säuberlich, F ^{[1
]}

Fritsche, J ^{[1
]}

Hunger, R ^{[1
]}

Klein, A ^{[1
]}

机构：

[1] Tech Univ Darmstadt, Inst Mat Sci, Surface Sci Div, D-64287 Darmstadt, Germany

来源：

THIN SOLID FILMS | 2003年 / 431卷

关键词：

zinc oxide; cadmium sulphide; interfaces; X-ray photolectron spectroscopy;

D O I：

10.1016/S0040-6090(03)00251-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The surfaces of sputtered zinc oxide (ZnO) films and its interfaces with US are investigated with X-ray photoelectron spectroscopy and soft X-ray photoelectron spectroscopy measured at the synchrotron radiation facility BESSY II. Cadmium sulfide (CdS) films are prepared by thermal evaporation from the compound and the zinc oxide films by DC magnetron sputtering from an undoped zinc oxide target at low power densities with and without addition of oxygen to the sputtering gas. ZnO films deposited at room temperatures show an additional oxygen component located at the surface that can be mostly removed by heat treatment. The electronic interface properties are studied in dependence to ZnO deposition conditions. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：378 / 381

页数：4

共 7 条

[1]

[Anonymous], MAT RES SOC S P

[2] Characterisation and modelling of chalcopyrite solar cells [J].

Klenk, R .

THIN SOLID FILMS, 2001, 387 (1-2) :135-140

[3] Electronic properties of Cu(In,Ga)Se2 heterojunction solar cells-recent achievements, current understanding, and future challenges [J].

Rau, U ;

Schock, HW .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (02) :131-147

[4] PHOTOEMISSION-STUDIES OF THE ZNO CDS INTERFACE [J].

RUCKH, M ;

SCHMID, D ;

SCHOCK, HW .

JOURNAL OF APPLIED PHYSICS, 1994, 76 (10) :5945-5948

[5]

Schon G., 1973, Journal of Electron Spectroscopy and Related Phenomena, V2, P75, DOI 10.1016/0368-2048(73)80049-0

[6]

WOLL C, COMMUNICATION

[7] A phenomenological model for systematization and prediction of doping limits in II-VI and I-III-VI2 compounds [J].

Zhang, SB ;

Wei, SH ;

Zunger, A .

JOURNAL OF APPLIED PHYSICS, 1998, 83 (06) :3192-3196

← 1 →