Microhardness of thin solid films

被引:10
作者
Navratil, V [1 ]
Stejskalova, V [1 ]
机构
[1] MASARYK UNIV,FAC SCI,DEPT GEN PHYS,CZ-61137 BRNO,CZECH REPUBLIC
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1996年 / 157卷 / 02期
关键词
D O I
10.1002/pssa.2211570216
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The microhardness of various thin solid films was measured by using a method based on the calculation of the relative contribution of substrate and coating to the ''composite'' microhardness value measured for hard coatings on softer substrate. The results obtained confirm the application of the method used and allow to give some conclusions concerning the influence of the technological process oil the mechanical properties of thin films.
引用
收藏
页码:339 / 344
页数:6
相关论文
共 10 条
[1]   THE MECHANICAL-PROPERTIES OF WEAR-RESISTANT COATINGS .1. MODELING OF HARDNESS BEHAVIOR [J].
BURNETT, PJ ;
RICKERBY, DS .
THIN SOLID FILMS, 1987, 148 (01) :41-50
[2]  
CABARROCAS PRI, 1992, 11 PHOT SOL EN C MON, P170
[3]  
IVANOKO TL, 1968, TVERDOST
[4]  
JANCA J, 1991, PHYSICA, V48
[5]   HARDNESS MEASUREMENTS OF THIN-FILMS [J].
JONSSON, B ;
HOGMARK, S .
THIN SOLID FILMS, 1984, 114 (03) :257-269
[6]  
KINOSHITA Y, 1987, THIN SOLID FILMS, V148, P325
[7]   THE INFLUENCE OF SUBSTRATE HARDNESS ON THE RESPONSE OF TIN-COATED STEELS TO SURFACE DEFORMATION [J].
KNIGHT, JC ;
PAGE, TF ;
HUTCHINGS, IM .
THIN SOLID FILMS, 1989, 177 :117-132
[8]   A MODEL FOR HARDNESS RESPONSE OF COATED MATERIALS [J].
NEMEC, P ;
NAVRATIL, V .
JOURNAL OF MATERIALS SCIENCE LETTERS, 1994, 13 (16) :1179-1180
[9]   HARDNESS MEASUREMENT AT PENETRATION DEPTHS AS SMALL AS 20-NM [J].
PETHICA, JB ;
HUTCHINGS, R ;
OLIVER, WC .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1983, 48 (04) :593-606
[10]   ON THE DEFINITION OF MICROHARDNESS [J].
YOST, FG .
METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1983, 14 (05) :947-952