Peculiarities of field electron emission from CVD diamond films

被引：12

作者：

Karabutov, AV ^{[1
]}

Konov, VI ^{[1
]}

Pimenov, SM ^{[1
]}

Frolov, VD ^{[1
]}

Obraztsova, ED ^{[1
]}

Polyakov, VI ^{[1
]}

Rossukanyi, NM ^{[1
]}

机构：

[1] RUSSIAN ACAD SCI,INST RADIO ENGN & ELECT,MOSCOW 103907,RUSSIA

来源：

JOURNAL DE PHYSIQUE IV | 1996年 / 6卷 / C5期

关键词：

D O I：

10.1051/jp4:1996518

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Results ale reported on characterization of the field electron emission from diamond films grown by de are discharge plasma CVD onto Si substrates from CH4-H-2 gas mixtures. The field electron emission was observed at 15-20 V/mu m. Emission current-voltage dependences were studied for films prepared at different CVD conditions and post-growth surface treatment/modification (ultrathin metal and metal oxide coatings, MW-plasma processing, laser-induced surface graphitization). Features of emission current versus applied field behaviour (including a hysteresis phenomenon, vacuum are initiation) and ultralow (0.1-0.5 eV) values of effective work function derived from Fowler-Nordheim plot fitting are discussed. A high vacuum scanning tunneling-field emission microscope was applied for simultaneous mapping of field electron emission inten-sity, topography and work function to study electronic and structural properties of field emission centers.

引用

页码：113 / 118

页数：6

共 19 条

[1] DEEP-LEVEL TRANSIENT CHARGE SPECTROSCOPY OF SN DONORS IN ALXGA1-XAS [J].

ARORA, BM ;

CHAKRAVARTY, S ;

SUBRAMANIAN, S ;

POLYAKOV, VI ;

ERMAKOV, MG ;

ERMAKOVA, ON ;

PEROV, PI .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (04) :1802-1806

[2]

FROLOV VD, 1996, 3 INT S DIAM FILMS S

[3] ELECTRON FIELD-EMISSION FROM DIAMOND AND OTHER CARBON MATERIALS AFTER H-2, O-2 AND CS TREATMENT [J].

GEIS, MW ;

TWICHELL, JC ;

MACAULAY, J ;

OKANO, K .

APPLIED PHYSICS LETTERS, 1995, 67 (09) :1328-1330

[4] Cold emission from the single-crystalline microparticle of diamond on a Si tip [J].

Givargizov, EI ;

Zhirnov, VV ;

Kuznetsov, AV ;

Plekhanov, PS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03) :2030-2033

[5]

Groning O, 1996, APPL PHYS LETT, V69, P476, DOI 10.1063/1.118145

[6] QUANTUM PHOTOYIELD OF DIAMOND(111) - STABLE NEGATIVE-AFFINITY EMITTER [J].

HIMPSEL, FJ ;

KNAPP, JA ;

VANVECHTEN, JA ;

EASTMAN, DE .

PHYSICAL REVIEW B, 1979, 20 (02) :624-627

[7]

KARABUTOV AV, 1996, 3 INT S DIAM FILMS S

[8] DC-ARC PLASMA DEPOSITION OF SMOOTH NANOCRYSTALLINE DIAMOND FILMS [J].

KONOV, VI ;

SMOLIN, AA ;

RALCHENKO, VG ;

PIMENOV, SM ;

OBRAZTSOVA, ED ;

LOUBNIN, EN ;

METEV, SM ;

SEPOLD, G .

[9]

LEE S, 1996, 43 INT FIELD EM S MO

[10]

MASKIE WA, 1996, J VAC SCI TECHNOL B, V14, P2041

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