Effect of nitrogen addition on the elastic and structural properties of amorphous carbon thin films

被引：16

作者：

Valentini, L

Kenny, JM

Carlotti, G

Guerrieri, M

Signorelli, G

Lozzi, L

Santucci, S

机构：

[1] Univ Perugia, Mat Engn Ctr, I-05100 Terni, Italy

[2] Univ Perugia, Dipartimento Fis, Unita INFM, I-06100 Perugia, Italy

[3] Univ Aquila, Dipartimento Fis, Unita INFM, I-67010 Laquila, Italy

来源：

THIN SOLID FILMS | 2001年 / 389卷 / 1-2期

关键词：

elastic properties; Raman scattering; Brillouin light scattering; X-ray photoelectron spectroscopy;

D O I：

10.1016/S0040-6090(01)00879-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nitrogen-doped amorphous hydrogenated hard carbon films were deposited by r.f. glow discharge from methane-nitrogen mixtures onto silicon substrates. The elastic properties of films obtained for different N-2 partial pressures were investigated by Brillouin light scattering, while Raman spectroscopy, X-ray photoelectron spectroscopy and X-ray reflectivity were exploited to study their structural and vibrational properties. Addition of a low percentage of nitrogen in the films induces marked modifications of the microscopic film structure, which induces a clear decrease of the elastic constants. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：315 / 320

页数：6

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[1] SENSITIVITY OF THE LINEAR LOGISTIC TEST MODEL TO MISSPECIFICATION OF THE WEIGHT MATRIX [J].