共 21 条
Rubrene polycrystalline transistor channel achieved through in situ vacuum annealing
被引:40
作者:
Park, Se-W.
[1
]
Jeong, S. H.
[1
]
Choi, Jeong-M.
[1
]
Hwang, Jung Min
[1
]
Kim, Jae Hoon
[1
]
Im, Seongil
[1
]
机构:
[1] Yonsei Univ, Inst Phys & Appl Phys, Seoul 120749, South Korea
关键词:
D O I:
10.1063/1.2756379
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
The authors report on the rubrene polycrystalline film growth for its thin film transistor (TFT) applications. Amorphous rubrene thin film was initially obtained on 200-nm-thick SiO2/Si substrate at 40 degrees C in a vacuum chamber by thermal evaporation but in situ long time postannealing at the elevated temperatures of 60-80 degrees C transformed the amorphous phase into crystalline. Based on an optimum condition to cover the whole channel area with polycrystalline film, the authors have fabricated a rubrene TFT with a relatively high field effect mobility of 0.002 cm(2)/V s, an on/off ratio of similar to 10(4), and a low threshold voltage of -9 V. (C) 2007 American Institute of Physics.
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