Current vs voltage characteristics of Al-Al2O3-Pd tunnel junction hydrogen sensor

被引:9
作者
Okuyama, S
Okuyama, K
Takinami, N
Matsushita, K
Kumagai, Y
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 4A期
关键词
MIM; tunnel; Pd; hydrogen; gas sensor; work function; barrier height;
D O I
10.1143/JJAP.35.2266
中图分类号
O59 [应用物理学];
学科分类号
摘要
The conduction mechanism of an Al-Al2O3-Pd MIM (metal-insulator-metal) junction which can operate as a hydrogen gas sensor tvas investigated using the logarithmic derivative of the current curve, Fowler-Nordheim plot and temperature dependence of the junction current. Al-Al2O3-Pd junctions showed current-voltage characteristics typical of tunneling conduction at voltages above 3 V. The barrier height of the Pd-Al2O3 contact obtained from the position of the logarithmic derivative maximum of the current was 3.4 eV in vacuum, and decreased to 2.7 eV upon introduction of 40 Pa hydrogen. On the other hand; the barrier height of the Al-Al2O3 contact was 1.8 eV in vacuum and was unchanged even when 40 Pa of hydrogen gas was introduced.
引用
收藏
页码:2266 / 2270
页数:5
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