A micro-aperture electrostatic field mill based on MEMS technology

被引:77
作者
Horenstein, MN [1 ]
Stone, PR [1 ]
机构
[1] Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA
关键词
electrostatic field measurements; micro-electromechanics; MEMS; resonant comb drive; field meter; field mill;
D O I
10.1016/S0304-3886(01)00048-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A miniature electrostatic field mill has been constructed using a silicon surface micromachining MEMS fabrication process. A moving shuttle with a viewing aperture of 10 mum(2) periodically exposes and covers a charge sensing electrode, thus allowing the latter to measure electrostatic field magnitudes. A signal output on the order of 40 nV per V/m of measured field is reported. Electrostatic force is produced by interdigitated comb drives. Mechanical restoring force is produced by a folded beam suspension system. Techniques for reducing unwanted coupling of drive signals are discussed. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:515 / 521
页数:7
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