Physical mechanisms governing pattern fidelity in microscale offset printing

被引:56
作者
Darhuber, AA
Troian, SM [1 ]
Wagner, S
机构
[1] Princeton Univ, Dept Chem Engn, Microfluid Dynam Lab, Princeton, NJ 08544 USA
[2] Princeton Univ, Dept Elect Engn, Princeton, NJ 08544 USA
关键词
D O I
10.1063/1.1389080
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have studied the offset printing of liquid polymers curable by exposure to ultraviolet light onto flat and unpatterned silicon and glass substrates. The interplay of capillary, viscous, and adhesion forces dominates the dynamics of ink transfer at small feature sizes and low capillary number. For smooth and nonporous substrates, pattern fidelity can be compromised because the ink contact lines are free to migrate across the substrate during plate separation. Using a combination of experiments and equilibrium simulations, we have identified the physical mechanisms controlling ink transfer and pattern fidelity. In considering the resolution limit of this technique, it appears that the dynamics of ink flow and redistribution during transfer do not explicitly depend on the absolute feature size, but only on the aspect ratio of film thickness to feature size. Direct printing holds promise as a high-throughput fabrication method for large area electronics. (C) 2001 American Institute of Physics.
引用
收藏
页码:3602 / 3609
页数:8
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