Rapid prototyping of glass and PDMS microstructures for micro total analytical systems and micro chemical reactors by microfabrication in the general laboratory

被引：113

作者：

McCreedy, T ^{[1
]}

机构：

[1] Univ Hull, Dept Chem, Kingston Upon Hull HU6 7RX, N Humberside, England

来源：

ANALYTICA CHIMICA ACTA | 2001年 / 427卷 / 01期

关键词：

microfabrication; photolithography; miniaturization; mu TAS;

D O I：

10.1016/S0003-2670(00)01174-0

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A method is presented that permits the microfabrication of glass chips for micro total analytical systems and micro chemical reactors in the general laboratory. The method does not require any specialist facilities, and for the first time provides a reliable and reproducible method for fabricating such devices without access to a clean room. The predictability of the process is achieved by utilising commercially available starting materials. (C) 2001 Elsevier Science B.V. Ail rights reserved.

引用

页码：39 / 43

页数：5

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