Theory of hydrogen in semiconductors

被引：7

作者：

Van de Walle, CG ^{[1
]}

机构：

[1] Xerox Corp, Palo Alto Res Ctr, Palo Alto, CA 94304 USA

来源：

HYDROGEN IN SEMICONDUCTORS AND METALS | 1998年 / 513卷

关键词：

D O I：

10.1557/PROC-513-55

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper treats the subject of hydrogen in semiconductors from various perspectives. First, a brief historical overview is given. Then, some basic principles governing the interaction between hydrogen and semiconductors are outlined. Finally, specific examples will emphasize the impact of hydrogen on technological applications. While the general treatment applies to interactions of hydrogen with any semiconductor, the applications will focus mainly on hydrogen interacting with silicon.

引用

页码：55 / 66

页数：12