Integrated optical Mach-Zehnder modulator based on polycrystalline BaTiO3

被引：40

作者：

Petraru, A ^{[1
]}

Schubert, J ^{[1
]}

Schmid, M ^{[1
]}

Trithaveesak, O ^{[1
]}

Buchal, C ^{[1
]}

机构：

[1] Forschungszentrum Julich, ISG1, IT,Inst Schichten & Grenzflachen, D-52425 Julich, Germany

来源：

OPTICS LETTERS | 2003年 / 28卷 / 24期

关键词：

D O I：

10.1364/OL.28.002527

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Good-quality polycrystalline BaTiO3 thin films are deposited on MgO substrates by pulsed laser deposition. The deposition parameters are optimized to achieve optical-quality films with an attenuation coefficient of 4 dB/cm at the 633-nm wavelength. Thin-film electro-optic Mach-Zehnder modulators are fabricated with standard lithography and ion-beam etching. The waveguides patterned by lithography are the ridge type, and they ensure single-mode propagation in the wavelength range of 633 - 1550 nm. An electro-optic coefficient of 22 pm/V is estimated for the polycrystalline BaTiO3 films. (C) 2003 Optical Society of America.

引用

页码：2527 / 2529

页数：3

共 8 条

[1] Stress-induced lateral confinement of light in epitaxial BaTiO3 films grown by radio-frequency magnetron sputtering [J].

Barrios, P ;

Kim, HK .

APPLIED PHYSICS LETTERS, 1998, 73 (08) :1017-1019

[2] Structural and optical characterization of epitaxial waveguiding BaTiO3 thin films on MgO [J].

Beckers, L ;

Schubert, J ;

Zander, W ;

Ziesmann, J ;

Eckau, A ;

Leinenbach, P ;

Buchal, C .

JOURNAL OF APPLIED PHYSICS, 1998, 83 (06) :3305-3310

[3] Thin film channel waveguides fabricated in metalorganic chemical vapor deposition grown BaTiO3 on MgO [J].

Gill, DM ;

Block, BA ;

Conrad, CW ;

Wessels, BW ;

Ho, ST .

APPLIED PHYSICS LETTERS, 1996, 69 (20) :2968-2970

[4] Crystalline oxides on silicon: The first five monolayers [J].

McKee, RA ;

Walker, FJ ;

Chisholm, MF .

PHYSICAL REVIEW LETTERS, 1998, 81 (14) :3014-3017

[5] INVESTIGATION OF THE STRUCTURE OF BARIUM-TITANATE THIN-FILMS BY RAMAN-SPECTROSCOPY [J].

ROBINS, LH ;

KAISER, DL ;

ROTTER, LD ;

SCHENCK, PK ;

STAUF, GT ;

RYTZ, D .

JOURNAL OF APPLIED PHYSICS, 1994, 76 (11) :7487-7498

[6] MEASUREMENT OF THIN-FILM PARAMETERS WITH A PRISM COUPLER [J].

ULRICH, R ;

TORGE, R .

APPLIED OPTICS, 1973, 12 (12) :2901-2908

[7] OPTICAL CLARITY AND WAVE-GUIDE PERFORMANCE OF THIN-FILM PEROVSKITES ON MGO [J].

WALKER, FJ ;

MCKEE, RA ;

YEN, HW ;

ZELMON, DE .

APPLIED PHYSICS LETTERS, 1994, 65 (12) :1495-1497

[8] DIELECTRIC, ELASTIC, PIEZOELECTRIC, ELECTROOPTIC, AND ELASTO-OPTIC TENSORS OF BATIO3 CRYSTALS [J].

ZGONIK, M ;

BERNASCONI, P ;

DUELLI, M ;

SCHLESSER, R ;

GUNTER, P ;

GARRETT, MH ;

RYTZ, D ;

ZHU, Y ;

WU, X .

PHYSICAL REVIEW B, 1994, 50 (09) :5941-5949

← 1 →