The magnetic properties of cobalt films produced by glancing angle deposition

被引:15
作者
Liu, F [1 ]
Yu, C
Shen, L
Barnard, J
Mankey, GJ
机构
[1] Univ Alabama, Ctr Mat Informat Technol, Tuscaloosa, AL 35487 USA
[2] Argonne Natl Lab, Argonne, IL 60439 USA
[3] Vanderbilt Univ, Dept Phys & Astron, Nashville, TN 37235 USA
基金
美国国家科学基金会;
关键词
cobalt films; electron-beam evaporation; perpendicular anisotropy; magnetic particles;
D O I
10.1109/20.908634
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The magnetic properties of columnar cobalt films fabricated by glancing angle deposition were investigated. Varying the azimuthal rotation speed and polar angle of incidence of the vapor flux produces films with different microstructures, The magnetic anisotropies and squareness ratio between perpendicular and in-plane hysteresis loops are measured for various films and found to have a weak dependence on the azimuthal rotation speed of the substrate at the polar angle of 75 degrees, The squareness ratio is strongly affected by the variation of the polar angle of incidence of the vapor flux, At an azimuthal rotation speed of 0.092 rev/s and polar angle of 83 degrees, the Co film is composed of well-separated columns with the packing fraction of 0.3. The hysteresis loops of this film exhibit a perpendicular anisotropy with the squarness ratio of 1.6. The X-ray diffraction spectrum shows that the Co columns possess a strong (2112) preferred orientation, which indicates that the perpendicular anisotropy is from shape anisotropy and not from crystalline anisotropy.
引用
收藏
页码:2939 / 2941
页数:3
相关论文
共 5 条
[1]   The growth of nanoscale structured iron films by glancing angle deposition [J].
Liu, F ;
Umlor, MT ;
Shen, L ;
Weston, J ;
Eads, W ;
Barnard, JA ;
Mankey, GJ .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (08) :5486-5488
[2]  
MESSONNIER S, 1997, EXOT PET PRACT, V2, P15
[3]   Advanced techniques for glancing angle deposition [J].
Robbie, K ;
Sit, JC ;
Brett, MJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (03) :1115-1122
[4]   FABRICATION OF THIN-FILMS WITH HIGHLY POROUS MICROSTRUCTURES [J].
ROBBIE, K ;
FRIEDRICH, LJ ;
DEW, SK ;
SMY, T ;
BRETT, MJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03) :1032-1035
[5]   Sculptured thin films and glancing angle deposition: Growth mechanics and applications [J].
Robbie, K ;
Brett, MJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03) :1460-1465