Optical detection of quasi-static actuation of nanoelectromechanical systems

被引：16

作者：

Meyer, C

Lorenz, H

Karrai, K

机构：

[1] Univ Munich, Ctr Nanosci, D-80539 Munich, Germany

[2] Univ Munich, Sekt Phys, D-80539 Munich, Germany

来源：

APPLIED PHYSICS LETTERS | 2003年 / 83卷 / 12期

关键词：

D O I：

10.1063/1.1608491

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An all optical method designed to test the functionality of nanoelectromechanical systems is presented. Silicon tweezers consisting of freestanding nanometer-sized prongs are prepared using electron beam lithography. Images of the tweezers structures are taken by scanning confocal microscopy while the prongs are electrostatically actuated under a low frequency ac voltage. The images, which are demodulated at the actuation frequency and its higher harmonics, clearly resolve the actuating parts of the tweezers. An actuation amplitude down to 6 pm (rms)/rootHz can be detected. (C) 2003 American Institute of Physics.

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页码：2420 / 2422

页数：3

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