Characterization of anodic oxide film formed on TiN coating in neutral borate buffer solution

被引:22
作者
Azumi, K
Watanabe, S
Seo, M
Saeki, I
Inokuchi, Y
James, P
Smyrl, WH
机构
[1] Hokkaido Univ, Grad Sch Engn, Kita Ku, Sapporo, Hokkaido 060, Japan
[2] Kawasaki Steel Corp, Tech Res Div, Chiba 260, Japan
[3] Univ Minnesota, Corros Res Ctr, Dept Chem Engn & Mat Sci, Minneapolis, MN 55455 USA
关键词
TiN; anodic oxide film; FT-IR; photocurrent; impedance;
D O I
10.1016/S0010-938X(98)00031-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Properties of the oxide layer formed on a TiN coating by anodic oxidation in neutral borate buffer solution were investigated using cyclic voltammetry, AFM, FT-IR, impedance and photocurrent measurements. The voltammogram showed imperfections in the TiN coating and high susceptibility of anodic oxidation. The result of FT-IR showed the composition of an oxide layer, similar to TiO2, including OH- or water. Both impedance and photocurrent results confirmed that the oxide film has n-type semiconductor properties. The oxide would contain defects acting as intergap states, resulting in low efficiency of photo-induced free-carrier generation. It seems that these defects have their origin in degradation of the protective property of a TiN coating under anodic polarization. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:1363 / 1377
页数:15
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