Deformation behavior of gold nano-pillars prepared by nanoimprinting and focused ion-beam milling

被引：35

作者：

Dietiker, M. ^{[1
]}

Buzzi, S. ^{[2
]}

Pigozzi, G. ^{[1
]}

Loeffler, J. F. ^{[2
]}

Spolenak, R. ^{[1
]}

机构：

[1] ETH, Dept Mat, Lab Nanomet, CH-8093 Zurich, Switzerland

[2] ETH, Dept Mat, Lab Met Phys & Technol, CH-8093 Zurich, Switzerland

来源：

ACTA MATERIALIA | 2011年 / 59卷 / 05期

关键词：

Compression test; Plastic deformation; Nanostructured metals; Mechanical properties; Ion beam processing; STRAIN GRADIENT PLASTICITY; DISCRETE DISLOCATION SIMULATIONS; MECHANICAL-PROPERTIES; THIN-FILMS; SUBMICROMETER-PILLARS; SINGLE-CRYSTALS; LENGTH SCALE; MICRON SCALE; STRENGTH; HARDNESS;

D O I：

10.1016/j.actamat.2010.12.019

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The deformation behavior of single- and polycrystalline gold pillars with diameters in the 150-1000 nm range was investigated at room temperature by compression testing. The pillars were produced by nanoimprinting and focused ion-beam (FIB) milling, and characterized by scanning electron microscopy (SEM) and electron backscatter diffraction (EBSD). No significant differences in the flow strength level or scaling behavior were observed when nanoimprinted pillars were compared with FIB-milled pillars with comparable diameters. These observations justify the use of FIB milling for the study of scaling behavior in this material system. Weibull statistics were used to analyze the distribution of strength levels, and a minimum in experimental scatter was identified at intermediate pillar size in comparison with their microstructural length scales. (C) 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

引用

页码：2180 / 2192

页数：13

共 43 条

[1] Dislocation mechanisms in the first stage of plasticity of nanoindented Au(111) surfaces [J].

Asenjo, A ;

Jaafar, M ;

Carrasco, E ;

Rojo, JM .

PHYSICAL REVIEW B, 2006, 73 (07)

[2] DEFORMATION OF PLASTICALLY NON-HOMOGENEOUS MATERIALS [J].

ASHBY, MF .

PHILOSOPHICAL MAGAZINE, 1970, 21 (170) :399-&

[3] Effects of pre-strain on the compressive stress-strain response of Mo-alloy single-crystal micropillars [J].

Bei, H. ;

Shim, S. ;

Pharr, G. M. ;

George, E. P. .

ACTA MATERIALIA, 2008, 56 (17) :4762-4770

[4] Effects of focused ion beam milling on the nanomechanical behavior of a molybdenum-alloy single crystal [J].

Bei, H. ;

Shim, S. .

APPLIED PHYSICS LETTERS, 2007, 91 (11)

[5] Compressive strengths of molybdenum alloy micro-pillars prepared using a new technique [J].

Bei, H. ;

Shim, S. ;

George, E. P. ;

Miller, M. K. ;

Herbert, E. G. ;

Pharr, G. M. .

SCRIPTA MATERIALIA, 2007, 57 (05) :397-400

[6] TENSILE STRENGTH OF WHISKERS [J].

BRENNER, SS .

JOURNAL OF APPLIED PHYSICS, 1956, 27 (12) :1484-1491

[7] Deformation behavior of silver submicrometer-pillars prepared by nanoimprinting [J].

Buzzi, S. ;

Dietiker, M. ;

Kunze, K. ;

Spolenak, R. ;

Loeffler, J. F. .

PHILOSOPHICAL MAGAZINE, 2009, 89 (10) :869-884

[8] Metal direct nanoimprinting for photonics [J].

Buzzi, Stefano ;

Robin, Franck ;

Callegari, Victor ;

Loeffler, Jorg F. .

MICROELECTRONIC ENGINEERING, 2008, 85 (02) :419-424

[9] Anomalous plastic deformation at surfaces: Nanoindentation of gold single crystals [J].

Corcoran, SG ;

Colton, RJ ;

Lilleodden, ET ;

Gerberich, WW .

PHYSICAL REVIEW B, 1997, 55 (24) :16057-16060

[10] Nanoindentation of single-crystalline gold thin films: Correlating hardness and the onset of plasticity [J].

Dietiker, Marianne ;

Nyilas, Ralph D. ;

Solenthaler, Christian ;

Spolenak, Ralph .

ACTA MATERIALIA, 2008, 56 (15) :3887-3899

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