The mu-flown: A novel device for measuring acoustic flows

被引:108
作者
deBree, HE
Leussink, P
Korthurst, T
Jansen, H
Lammerink, TSJ
Elwenspoek, M
机构
[1] MESA Research Institute, University of Twente, 7500 AE Enschede
关键词
acoustic flow; microflown;
D O I
10.1016/S0924-4247(97)80013-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An acoustic wave consists of two elements, the acoustic pressure and the acoustic flow, Up to now one has to measure the pressure and calculate the flow to determine the acoustic flow, so it would be convenient to have a sensor that is able to measure acoustic flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles or this dynamic Row sensor, the fabrication process, the electronics and some of its interesting applications will be presented. This micro-machined device measuring acoustic flows is called the microflown or mu-flown.
引用
收藏
页码:552 / 557
页数:6
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