Micromachined CMOS calorimetric chemical sensor with on-chip low noise amplifier

被引：10

作者：

Koll, A ^{[1
]}

Schaufelbühl, A ^{[1
]}

Schneeberger, N ^{[1
]}

Münch, U ^{[1
]}

Brand, O ^{[1
]}

Baltes, H ^{[1
]}

Menolfi, C ^{[1
]}

Huang, Q ^{[1
]}

机构：

[1] ETH Zurich, Phys Elect Lab, CH-8093 Zurich, Switzerland

来源：

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年

关键词：

D O I：

10.1109/MEMSYS.1999.746887

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

We report on a micromachined calorimetric chemical sensor for volatile organic compounds in air fabricated in industrial CMOS technology. The sensor measures enthalpy changes during absorption and desorption of a gaseous analyte into a chemically selective polymer. The enthalpy changes cause temperature variations of a thermally insulated micromachined membrane. The temperature variations are detected using thermopiles integrated on the membrane. The microsystem consists of a polymer coated sensor structure, an uncoated reference structure, and a low noise differential amplifier amplifying the difference of the two thermovoltages. The system provides a sensitivity of 51.1 mV/mu W, resolving enthalpy changes of the order of mu J at sampling intervals down to 45 ms. To demonstrate the sensitivity and selectivity of the calorimetric chemical microsystem, we present results of different volatile organic compounds (VOCs).

引用

页码：547 / 551

页数：5

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