Study on surface acoustic wave characteristics of SiO2/interdigital-transducer/ZnO/diamond structure and fabrication of 2.5 GHz narrow band filter

被引：51

作者：

Nakahata, H ^{[1
]}

Kitabayashi, H ^{[1
]}

Uemura, T ^{[1
]}

Hachigo, A ^{[1
]}

Higaki, K ^{[1
]}

Fujii, S ^{[1
]}

Seki, Y ^{[1
]}

Yoshida, K ^{[1
]}

Shikata, S ^{[1
]}

机构：

[1] Sumitomo Elect Ind Ltd, Itami Res Labs, Itami, Hyogo 6640016, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1998年 / 37卷 / 5B期

关键词：

surface acoustic wave; narrow band filter; diamond; ZnO; SiO2; velocity; temperature coefficient of frequency; electromechanical coupling coefficient;

D O I：

10.1143/JJAP.37.2918

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Surface acoustic wave (SAW) characteristics of the SiO2/interdigital-transducer(IDT)/ZnO/diamond structure were studied theoretically and experimentally. It was found that the 2nd mode in this structure can provide a zero temperature coefficient of frequency (TCF) as well as high velocity of 10,000 m/s and a large electromechanical coupling coefficient of 1.4%. Utilizing this wave, a 2.5 GHz narrow-band SAW filter was successfully fabricated with IDTs of 0.9 mu m finger width, which resulted in superior characteristics for a retiming filter with a small insertion loss of 6.7 dB, Q value of 660 and small frequency deviation of 100 ppm in the temperature range from -40 to 85 degrees C. The insertion loss is smaller than any other retiming filters which have ever been reported with quartz, a conventional SAW material, and also the frequency deviation with temperature is smaller than that in the case of ST-cut quartz.

引用

页码：2918 / 2922

页数：5

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