A low-temperature and low-cost method to produce high-quality epitaxial anatase TiO2 thin films

被引:11
作者
Zhang, ZM [1 ]
机构
[1] Australian Nucl Sci & Technol Org, Lucas Heights, NSW 2234, Australia
关键词
D O I
10.1557/JMR.2005.0036
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Epitaxial anatase TiO2 thin films were successfully grown on lattice-matched SrTiO3 (001) substrates by a novel hydrothermal method at very low temperatures (120-200 degrees C). This method is extremely simple and inexpensive in that the SrTiO3 substrate itself provides the source material for the TiO2 film. X-ray diffraction confirmed the high crystallinity and phase purity of the anatase films. The epitaxial relationship between the film and the substrate was determined as (001)[100]anatase H (001)[100]SrTiO3. Atomic force microscopy revealed the average size of the anatase crystallites as approximately 50 to 200 nm.
引用
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页码:292 / 294
页数:3
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