Low loss photoinduced waveguides in rapid thermally annealed films of chalcogenide glasses

被引：70

作者：

Ramachandran, S ^{[1
]}

Bishop, SG ^{[1
]}

机构：

[1] Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA

来源：

APPLIED PHYSICS LETTERS | 1999年 / 74卷 / 01期

关键词：

D O I：

10.1063/1.123118

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Rapid thermal annealing of sputter-deposited chalcogenide glasses is demonstrated to yield superior quality films which are used to fabricate low loss (<0.3 dB/cm) photoinduced channel waveguides in chalcogenide glasses. This process also enhances the photosensitivity and the magnitude of photoinduced index changes possible (Delta n similar to 5%) in these glass systems. (C) 1999 American Institute of Physics. [S0003-6951(99)00901-8].

引用

页码：13 / 15

页数：3

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