Diagnostics and Application of an Atmospheric Pressure Plasma Generated With a Hollowneedle-Plate Dielectric Barrier Discharge

An atmospheric pressure needle plasma is generated with a hollowneedle-plate dielectric barrier discharge, and the plasma parameters are measured by optical emission spectroscopy. The length of the needle plasma reaches 3 cm with an argon flow rate in the range from 3.5 to 6.1 ml/min when the applied voltage is 7.2 kV. The spatial distribution of oxygen-atom spectralline intensity indicates that there is a large concentration of excited oxygen atoms in the middle of the plasma. Gas temperature is estimated by simulating the spectrum of OH radical around 309 nm. The spatial distribution of gas temperature along the plasma is uniform. Gas temperature decreases with the increase in argon flow rate. Electron density determined by the Stark broadening of H-alpha is in the range from 5.8 x 10(14) to 6.0 x 10(14) cm(-3) when the electron temperature is 1-4 eV. The application of plasma in the modification of material surface is demonstrated.