共 19 条
[1]
HETEROGENEOUS CATALYTIC REACTIONS OF CHLOROFLUOROCARBONS
[J].
APPLIED CATALYSIS,
1990, 59 (01)
:123-128
[2]
Chapman B., 1980, GLOW DISCHARGE PROCE, DOI DOI 10.1063/1.2914660
[3]
CHRISTOPH FJ, 1965, Patent No. 3178483
[6]
Destructive abatement of CF4 and C2F6 via a plasma induced reaction with CaO
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1999, 17 (06)
:2664-2666