Enhanced GaN decomposition in H2 near atmospheric pressures

被引:77
作者
Koleske, DD [1 ]
Wickenden, AE [1 ]
Henry, RL [1 ]
Twigg, ME [1 ]
Culbertson, JC [1 ]
Gorman, RJ [1 ]
机构
[1] USN, Res Lab, Lab Adv Mat Synth, Div Elect Sci & Technol, Washington, DC 20375 USA
关键词
D O I
10.1063/1.122354
中图分类号
O59 [应用物理学];
学科分类号
摘要
GaN decomposition is studied at metallorganic vapor phase epitaxy pressures (i.e., 10-700 Torr) in flowing H-2. For temperatures ranging from 850 to 1050 degrees C, the GaN decomposition rate is accelerated when the H-2 pressure is increased above 100 Torr. The Ga desorption rate is found to be independent of pressure, and therefore, does not account for the enhanced GaN decomposition rate. Instead, the excess Ga from the decomposed GaN forms droplets on the surface which, for identical annealing conditions, increase in size as the pressure is increased. Possible connections between the enhanced GaN decomposition rate, the coarsening of the nucleation layer during the ramp to high temperature, and increased GaN grain size at high temperature are discussed. [S0003-6951(98)03540-2].
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页码:2018 / 2020
页数:3
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