Properties of diamondlike films obtained in a barrier discharge at atmospheric pressure

被引：9

作者：

Bugaev, SP ^{[1
]}

Korotaev, AD ^{[1
]}

Oskomov, KV ^{[1
]}

Sochugov, NS ^{[1
]}

机构：

[1] Russian Acad Sci, Inst High Current Elect, Siberian Branch, Tomsk 634055, Russia

来源：

TECHNICAL PHYSICS | 1997年 / 42卷 / 08期

关键词：

D O I：

10.1134/1.1258759

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Diamondlike films are synthesized from gaseous hydrocarbons in a barrier discharge at atmospheric pressure. The films were investigated using transmission electron microscopy, electron diffraction, and infrared spectroscopy. A technique for determining the quantitative characteristics of the films (hydrogen content, ratio of different types of carbon-carbon bonds and hydrocarbon groups) using standard samples is described. The highest-quality films were obtained from methane (ratio of hydrogen to carbon atom HC = 1.04, fraction of diamondlike to graphitelike bonds sp(3):sp(2) = 100% :0%) and from a mixture of acetylene and hydrogen in the ratio 1:19 (H/C = 0.73, sp(3) :sp(2) = 68%:32%). (C) 1997 American Institute of Physics.

引用

页码：945 / 949

页数：5

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