Thermally induced viscoelastic stresses in multilayer thin films

被引:7
作者
Chang, WJ [1 ]
Fang, TH
Lin, CM
机构
[1] Kun Shan Univ Technol, Dept Mech Engn, Tainan 710, Taiwan
[2] So Taiwan Univ Technol, Dept Mech Engn, Tainan 710, Taiwan
[3] WuFeng Inst Technol, Dept Mech Engn, Chiayi 621, Taiwan
关键词
D O I
10.1063/1.1905797
中图分类号
O59 [应用物理学];
学科分类号
摘要
This paper presents a viscoelastic analysis of the thermal stress in multilayer thin-film structures. In this analysis the viscoelastic field was calculated utilizing the Laplace transform. The thermal stress equation in the Laplace transform space can be numerically inverted to obtain the time domain. In the case of a single-layer film the stress of the thin film at any time can be obtained analytically. In a bilayer system, the normalized viscoelastic stress of the thin film is affected by the relaxation times, the biaxial moduli ratio, and the ratio of thickness between the film layer and the substrate. The effects of different ratio values of thickness on the normalized viscoelastic stress were analyzed. Viscoelastic stress can also be calculated if the elastic behavior in either the film or the substrate is considered. Furthermore, when both the substrate and film's relaxation times approach infinity, they begin to exhibit elastic behavior, and then the residual stress in the film can be determined. The residual stress results were shown to be identical to those results obtained by the elastic analysis. (c) 2005 American Institute of Physics.
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页数:4
相关论文
共 13 条
[1]  
CHANG JC, 1997, TAIWAN J MATH, V1, P21
[2]  
CHEN TC, 1990, ASME, V59, P510
[3]   Thermally induced optical effects in double-coated optical fibers by viscoelastic theory [J].
Chen, UC ;
Chang, WJ .
OPTICAL ENGINEERING, 2002, 41 (06) :1317-1323
[4]   Effects of stress on the interfacial reactions of metal thin films on (001)Si [J].
Cheng, SL ;
Lo, HM ;
Cheng, LW ;
Chang, SM ;
Chen, LJ .
THIN SOLID FILMS, 2003, 424 (01) :33-39
[5]   Thermal stresses in elastic multilayer systems [J].
Hsueh, CH .
THIN SOLID FILMS, 2002, 418 (02) :182-188
[6]   Effects of viscous flow on residual stresses in film/substrate systems [J].
Hsueh, CH ;
Lee, S .
JOURNAL OF APPLIED PHYSICS, 2002, 91 (05) :2760-2765
[7]   Elastic and elastic-plastic analysis of multilayer thin films: Closed-form solutions [J].
Hu, YY ;
Huang, WM .
JOURNAL OF APPLIED PHYSICS, 2004, 96 (08) :4154-4160
[8]   Viscoelastic stress relaxation in film/substrate systems - Kelvin model [J].
Ko, SC ;
Lee, S ;
Hsueh, CH .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (05) :2453-2457
[9]   ELASTIC AND VISCOELASTIC ANALYSIS OF STRESS IN THIN-FILMS [J].
LIU, HC ;
MURARKA, SP .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (08) :3458-3463
[10]   Mechanical and thermal stresses in multilayered materials [J].
Malzbender, J .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (04) :1780-1782