High-performance control of piezoelectric tube scanners

被引：142

作者：

Bhikkaji, B. ^{[1
]}

Ratnam, M. ^{[1
]}

Fleming, Andrew J. ^{[1
]}

Moheimani, S. O. Reza ^{[1
]}

机构：

[1] Univ Newcastle, Sch Elect Engn & Comp Sci, Newcastle, NSW 2308, Australia

来源：

IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY | 2007年 / 15卷 / 05期

关键词：

charge amplifiers; damping; feedback control; hysteresis; piezoelectric tube; raster pattern; resonant mode; system identification;

D O I：

10.1109/TCST.2007.902947

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, a piezoelectric tube of the type typically used in scanning tunneling microscopes (STMs) and atomic force microscopes (AFMs) is considered. Actuation of this piezoelectric tube is hampered by the presence of a lightly damped low-frequency resonant mode. The resonant mode is identified and damped using a positive velocity and position feedback (PVPF) controller, a control technique proposed in this paper. Input signals are then shaped such that the closed-loop system tracks a raster pattern. Normally, piezoelectric tubes are actuated using voltage amplifiers. Nonlinearity in the form of hysteresis is observed when actuating the piezoelectric tubes at high amplitudes using voltage amplifiers. It has been known for some time that hysteresis in piezoelectric actuators can be largely compensated by actuating them using charge amplifiers. In this paper, high-amplitude actuation of a piezoelectric tube is achieved using a charge amplifier.

引用

页码：853 / 866

页数：14

共 33 条

[1] Modeling piezoelectric actuators [J].

Adriaens, HJMTA ;

de Koning, WL ;

Banning, R .

IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2000, 5 (04) :331-341

[2]

[Anonymous], P 2 IFAC C MECH SYST

[3]

Bhushan B., 2004, SPRINGER HDB NANOTEC

[4]

CAUGHEY TK, 1982, DYNL823 CAL I TECHN

[5] Self-sensing magnetic levitation using a LC resonant circuit [J].

Choi, C ;

Park, K .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 72 (02) :169-177

[6]

Croft D, 2000, P AMER CONTR CONF, P2123, DOI 10.1109/ACC.2000.879576

[7] Phase control approach to hysteresis reduction [J].

Cruz-Hernández, JM ;

Hayward, V .

IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2001, 9 (01) :17-26

[8]

Daniele A., 1999, Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251), P253, DOI 10.1109/ACC.1999.782779

[9]

DOSCH JJ, 1992, PROCEEDINGS OF THE 31ST IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-4, P1815, DOI 10.1109/CDC.1992.371116

[10]

El Rifai OM, 2001, P AMER CONTR CONF, P3251, DOI 10.1109/ACC.2001.946423

← 1 2 3 4 →