The mechanical performance of DLC films on steel substrates

被引:141
作者
Wang, JS
Sugimura, Y
Evans, AG [1 ]
Tredway, WK
机构
[1] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
[2] United Technol Res Ctr, Hartford, CT 06108 USA
关键词
diamond; carbon; steel;
D O I
10.1016/S0040-6090(98)00418-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The thermomechanical properties of thin DLC films on steel substrates have been measured and related to their structure. The modulus and thermal expansion coefficient have been determined from beam curvature measurements conducted on Si and steel substrates. The fracture toughness and the adhesion have been characterized by using probes that introduce controlled strains into the DLC, through the substrate. Multistrain and sphere impression methods have been used for this purpose. The strains cause multiple cracking and local spalling events that can be analyzed to obtain the toughnesses. The DLC toughness is found to be similar to that for typical carbides. The interfaces have a much greater toughness, attributed to the use of a thin Cr adhesion layer. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:163 / 174
页数:12
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