Contact measurements providing basic design data for microrelay actuators

被引：64

作者：

Schimkat, J ^{[1
]}

机构：

[1] Engn Off, Schimkat, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 73卷 / 1-2期

关键词：

electric contact; electrostatic microrelay; microrelay; microswitch;

D O I：

10.1016/S0924-4247(98)00264-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design of an actuator for a microrelay substantially depends on the forces required for reliable operation. These forces were determined experimentally at Au, AuNi5 and Rh contact samples. Contact resistance was measured with contact forces varying continuously in the range from 0.1 mN to more than 10 mN. Cleanness of the samples close to that of the contacts inside a microrelay was achieved by a new method of in situ cleaning, called the 'Schaltreinigung' procedure. Well-suited contact materials for use in a microrelay were found to be AuNi5 and Rh, whereas Au is not due, to its high adherence. In the case of AuNi5 and Rh reliable operation is achieved by forces smaller than 0.5 mN and 0.9 mN respectively. The experimental results provide the basic design data for the development and optimization of microrelay actuators. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：138 / 143

页数：6

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