Study of electrical characteristics of porous alumina sensors for detection of low moisture in gases

被引：52

作者：

Basu, S ^{[1
]}

Chatterjee, S ^{[1
]}

Saha, M ^{[1
]}

Bandyopadhay, S ^{[1
]}

Mistry, KK ^{[1
]}

Sengupta, K ^{[1
]}

机构：

[1] Cent Glass & Ceram Res Inst, Electroceram Div, Kolkata 700032, W Bengal, India

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 79卷 / 2-3期

关键词：

porous compacts; electrodes; moisture sensor; ppmv moisture; capacitance;

D O I：

10.1016/S0925-4005(01)00872-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

It is well known that the electrical properties of porous alumina are sensitive to moisture and have potential use as humidity sensors. This paper presents a new type of micro-humidity sensor based on porous alumina. Here a moisture sensor based on porous alumina has been developed with interdigitated thick film electrodes. for the measurement of moisture concentration in the range of 50-100 ppm. The sensors have good sensitivity and are highly reproducible. In this paper, the sensor design, fabrication and characterization at different gaseous atmospheres and with varying moisture levels of gases are discussed. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：182 / 186

页数：5

共 8 条

[1] HUMIDITY SENSITIVITY OF NB2O5-DOPED TIO2 CERAMICS [J].

KATAYAMA, K ;

HASEGAWA, K ;

TAKAHASHI, Y ;

AKIBA, T ;

YANAGIDA, H .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 24 (01) :55-60

[2]

KOHTARO, 1996, CPM9638 OME, P25

[3] HUMIDITY SENSORS [J].

KULWICKI, BM .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (04) :697-708

[4] Study of the performance degradation of thin film aluminum oxide sensor at high humidity [J].

Nahar, RK .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 63 (1-2) :49-54

[5] Comparative study on micromorphology and humidity sensitive properties of thin-film and thick-film humidity sensors based on semiconducting MnWO4 [J].

Qu, WM ;

Wlodarski, W ;

Meyer, JU .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 64 (1-3) :76-82

[6] THEORETICAL-STUDIES ON THE IMPEDANCE HUMIDITY CHARACTERISTICS OF CERAMIC HUMIDITY SENSORS [J].

SHIMIZU, Y ;

ARAI, H ;

SEIYAMA, T .

SENSORS AND ACTUATORS, 1985, 7 (01) :11-22

[7]

SUN HT, 1989, SENSOR ACTUATOR, V19, P61, DOI 10.1016/0250-6874(89)87058-1

[8] HUMIDITY SENSORS - PRINCIPLES AND APPLICATIONS [J].

YAMAZOE, N ;

SHIMIZU, Y .

SENSORS AND ACTUATORS, 1986, 10 (3-4) :379-398

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