Micro-laser-induced breakdown spectroscopy technique: a powerful method for performing quantitative surface mapping on conductive and nonconductive samples

被引：113

作者：

Menut, D ^{[1
]}

Fichet, P ^{[1
]}

Lacour, JL ^{[1
]}

Rivoallan, A ^{[1
]}

Mauchien, P ^{[1
]}

机构：

[1] Commissariat Energie Atom Saclay, Nucl Energy Div, Lab Anal Laser & Etud Surface, F-91191 Gif Sur Yvette, France

来源：

APPLIED OPTICS | 2003年 / 42卷 / 30期

关键词：

D O I：

10.1364/AO.42.006063

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Laser-induced breakdown spectroscopy (LIBS) has been applied mainly to bulk analysis of solids, liquids, and gases and less frequently for elemental microanalysis of solid surfaces. A micro-LIBS device devoted to analysis of the distribution of elements on surfaces is described. This device offers rapid access with a 3-mum spatial resolution to the microchemical structures of both conductive and nonconductive samples. Quantitative microchemical results of applications to ceramics are reported. By the use of a time-resolved acquisition spectrum, cerium in a uranium matrix was characterized with a cerium detection limit of 1.14%. Calibration curves obtained with manipulations during 1 year facilitated evaluations of reproducibility and repeatability. A 2% single-shot repeatability with a calibration reproducibility of similar to7% is reported. (C) 2003 Optical Society of America.

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页码：6063 / 6071

页数：9

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