Fully integrated probe for proton nuclear magnetic resonance magnetometry

In this article, we present the first fully integrated nuclear magnetic resonance probe ever realized. Planar spiral coils, a radio-frequency preamplifier, a mixer, and an audio-frequency amplifier are integrated using a standard complementary metal-oxide-semiconductor technology on a single silicon chip of 10 mm(2). A 1 mm(3) solid sample of cis-polyisoprene, placed over one of the integrated coils, is used as resonating material. The realized integrated probe allows measurements of static magnetic fields from 0.7 to 7 T with a magnetic-field resolution better than 1 ppm/Hz(1/2), an absolute accuracy better than 3 ppm, and a spatial resolution of about 1 mm. (C) 2001 American Institute of Physics.