Deposition of fluorocarbon polymer films in a dielectric barrier discharge (DBD)

被引：40

作者：

Vinogradov, IP ^{[1
]}

Dinkelmann, A ^{[1
]}

Lunk, A ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Plasmaforsch, D-70569 Stuttgart, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 2003年 / 174卷

关键词：

fluorocarbon films; plasma deposition; dielectric barrier discharge;

D O I：

10.1016/S0257-8972(03)00615-7

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Investigations of an intermittent dielectric barrier discharge in fluorocarbon mixtures at atmospheric pressure are reported. Plasma diagnostics were performed by FTIR-absorption spectroscopy as well as by emission/absorption spectroscopy in the UV/VIS range. Deposited polymer films were investigated by FTIR absorption spectroscopy, XPS, SEM and surface energy measurements. The results of the film property measurements show a correlation to the results of plasma diagnostics. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：509 / 514

页数：6

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