Growth at GaN/AlN hetero structures: a local view

被引:3
作者
Boscherini, F
Lantier, R
Rizzi, A
D'Acapito, F
Mobilio, S
机构
[1] Univ Bologna, Dipartimento Fis, INFM, I-40127 Bologna, Italy
[2] ISI, Forschungszentrum, Julich, Germany
[3] Univ Modena, Dipartimento Fis, INFM, I-41100 Modena, Italy
[4] GILDA, OGG, INFM, F-38043 Grenoble, France
[5] Univ Roma Tre, Dipartimento Fis, Rome, Italy
[6] Nazl Frascati Lab, Ist Nazl Fis Nucl, Rome, Italy
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2001年 / 86卷 / 03期
关键词
nitrides; heterostructures; strain; X-ray absorption spectroscopy; synchrotron radiation;
D O I
10.1016/S0921-5107(01)00685-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The local structure at GaN on AlN(0001) heterostructures is studied using polarization dependent X-ray absorption spectroscopy with synchrotron radiation; the Ga K edge has been used and the analysis has been extended up to the third coordination shell. Samples have been deposited using molecular beam epitaxy with deposition temperatures in the range 620-790 degreesC and are approximately 6 mn. thick. We find that the GaN/AlN interface is abrupt (no interdiffusion) and that a partially pseudomorphically strained growth occurs, the in-plane strain increasing as the deposition temperature decreases. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:225 / 227
页数:3
相关论文
共 11 条
[1]   Elastic constants of III-V compound semiconductors: Modification of Keyes' relation [J].
Azuhata, T ;
Sota, T ;
Suzuki, K .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1996, 8 (18) :3111-3119
[2]   Evidence for relaxed and high-quality growth of GaN on SiC(0001) [J].
Boscherini, F ;
Lantier, R ;
Rizzi, A ;
D'Acapito, F ;
Mobilio, S .
APPLIED PHYSICS LETTERS, 1999, 74 (22) :3308-3310
[3]  
BOSCHERINI F, UNPUB
[4]   2D/3D growth of GaN by molecular beam epitaxy: towards GaN quantum dots [J].
Daudin, B ;
Widmann, F ;
Feuillet, G ;
Adelmann, C ;
Samson, Y ;
Arlery, M ;
Rouviere, JL .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 50 (1-3) :8-11
[5]   ELECTRONIC-STRUCTURE OF GAN WITH STRAIN AND PHONON DISTORTIONS [J].
KIM, K ;
LAMBRECHT, WRL ;
SEGALL, B .
PHYSICAL REVIEW B, 1994, 50 (03) :1502-1505
[6]   X-ray optics of a dynamical sagittal-focusing monochromator on the GILDA beamline at the ESRF [J].
Pascarelli, S ;
Boscherini, F ;
D'Acaptito, F ;
Hrdy, J ;
Meneghini, C ;
Mobilio, S .
JOURNAL OF SYNCHROTRON RADIATION, 1996, 3 :147-155
[7]   Elastic constants of gallium nitride [J].
Polian, A ;
Grimsditch, M ;
Grzegory, I .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (06) :3343-3344
[8]   STUDY OF ELASTIC PROPERTIES OF GALLIUM NITRIDE [J].
SAVASTENKO, VA ;
SHELEG, AU .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 48 (02) :K135-K139
[9]   Elastic moduli of gallium nitride [J].
Schwarz, RB ;
Khachaturyan, K ;
Weber, ER .
APPLIED PHYSICS LETTERS, 1997, 70 (09) :1122-1124
[10]   Elastic properties of zinc-blende and wurtzite AlN, GaN, and InN [J].
Wright, AF .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (06) :2833-2839