Raman scattering anisotropy in a system of (1 1 0)-oriented silicon nanocrystals formed in a-Si film

被引:8
作者
Efremov, MD [1 ]
Bolotov, VV
Volodin, VA
Kochubei, SA
机构
[1] Russian Acad Sci, Inst Semicond Phys, SB, Novosibirsk 630090, Russia
[2] RAS, Inst Sensor Microelect, SB, Omsk 644077, Russia
关键词
nanostructures; laser processing; phase transitions; phonons; inelastic light scattering;
D O I
10.1016/S0038-1098(98)00437-2
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Anisotropy of Raman scattering is observed in the system of silicon nanocrystals inside amorphous films. The observed anisotropy is established to be the result of planar correlated orientation of nanocrystals which have (1 1 0) orientation in the normal direction. Preferred orientation is proposed to be due to the deformation contribution in the process of nanocrystals formation under nanosecond laser impact. (C) 1998 Published by Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:645 / 648
页数:4
相关论文
共 12 条
[1]  
BAUER G, 1996, OPTICAL CHARACTERIZA
[2]  
BOLOTOV VV, 1993, SPR M MAT RES SOC SA
[3]  
BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[4]   EXPERIMENTAL-DETERMINATION OF THE NANOCRYSTALLINE VOLUME FRACTION IN SILICON THIN-FILMS FROM RAMAN-SPECTROSCOPY [J].
BUSTARRET, E ;
HACHICHA, MA ;
BRUNEL, M .
APPLIED PHYSICS LETTERS, 1988, 52 (20) :1675-1677
[5]  
Di GQ, 1996, APPL PHYS LETT, V68, P69, DOI 10.1063/1.116760
[6]   Raman and HREM observation of oriented silicon nanocrystals inside amorphous silicon films on glass substrates [J].
Efremov, MD ;
Bolotov, VV ;
Volodin, VA ;
Fedina, LI ;
Gutakovskij, AA ;
Kochubei, SA .
SOLID STATE PHENOMENA, 1997, 57-8 :507-512
[7]   Excimer laser and rapid thermal annealing stimulation of solid-phase nucleation and crystallization in amorphous silicon films on glass substrates [J].
Efremov, MD ;
Bolotov, VV ;
Volodin, VA ;
Fedina, LI ;
Lipatnikov, EA .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1996, 8 (03) :273-286
[8]   Formation of poly-Si films on glass substrates using excimer laser treatments [J].
Efremov, MD ;
Bolotov, VV ;
Volodin, VA ;
Lipatnikov, EA ;
Fedina, LI ;
Neizvestny, IG .
NONLINEAR OPTICS OF LOW-DIMENSIONAL STRUCTURES AND NEW MATERIALS - ICONO '95, 1996, 2801 :263-270
[9]   RAMAN-SCATTERING FROM SMALL PARTICLE-SIZE POLYCRYSTALLINE SILICON [J].
IQBAL, Z ;
VEPREK, S ;
WEBB, AP ;
CAPEZZUTO, P .
SOLID STATE COMMUNICATIONS, 1981, 37 (12) :993-996
[10]   PROBING THE CRYSTALLINITY OF EVAPORATED SILICON FILMS BY RAMAN-SCATTERING [J].
OKADA, T ;
IWAKI, T ;
KASAHARA, H ;
YAMAMOTO, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (02) :161-165