Anisotropic Mg incorporation in GaN growth on nonplanar templates

被引:12
作者
Ren, DW
Dapkus, PD [1 ]
机构
[1] Univ So Calif, Dept Elect Engn Electrophys, Los Angeles, CA 90089 USA
[2] Univ So Calif, Dept Phys & Astron, Los Angeles, CA 90089 USA
关键词
D O I
10.1063/1.1870121
中图分类号
O59 [应用物理学];
学科分类号
摘要
Anisotropic Mg incorporation has been observed in the growth of p-type GaN on nonplanar GaN templates. As shown by cross-sectional scanning electron microscopy and cathodoluminescence spectroscopy, Mg-doped GaN grown on (0001) mesa tops is observed to have higher Mg concentration than the counterpart layers grown on {11 (2) over bar2} sidewalls. The origin of this anisotropic Mg incorporation is believed to be associated with local surface structure on the different surface facets. More importantly, this unique structure of Mg-doped GaN provides a natural lateral current confinement that paves a promising path to fabrication of InGaN/GaN buried heterostructure lasers on these nonplanar templates. (C) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
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