Material characterization for III-nitride based light emitters

被引:5
作者
Kneissl, M [1 ]
Bour, DP [1 ]
Romano, LT [1 ]
Krusor, BS [1 ]
McCluskey, M [1 ]
Goetz, W [1 ]
Johnson, NM [1 ]
机构
[1] Xerox Corp, Palo Alto Res Ctr, Elect Mat Lab, Palo Alto, CA 94304 USA
来源
LIGHT-EMITTING DIODES: RESEARCH, MANUFACTURING, AND APPLICATIONS II | 1998年 / 3279卷
关键词
OMVPE; MOCVD; wide bandgap semiconductors; III-nitride; GaN; AlGaN; InGaN; light emitting diodes; laser diodes; quantum well;
D O I
10.1117/12.304411
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A review is presented of the electrical and optical properties of nitride based optoelectronic devices, in particular AlGaInN light emitting diodes and laser diode structures. The III-nitride films and devices were grown by organometalic vapor-phase epitaxy (OMVPE) on c- and a-face sapphire substrates. We will discuss the structural properties of GaN, InGaN and AlGaN films, heterostructures and InGaN/GaN quantum wells using X-ray diffraction and cross-sectional transmission electron microscope and describe their electrical and optical properties characterized by Hall effect, photoluminescence, and electroluminescence measurements.
引用
收藏
页码:69 / 76
页数:8
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