High-performance metal oxide nanowire chemical sensors with integrated micromachined hotplates

被引：26

作者：

Ryu, Koungmin ^{[1
]}

Zhang, Daihua ^{[1
]}

Zhoua, Chongwu ^{[1
]}

机构：

[1] Univ So Calif, Dept Elect Engn, Los Angeles, CA 90089 USA

来源：

APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 09期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.2841665

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate the fast and scalable integration of nanowire chemical sensors with micromachined hotplates built on SiN membranes. These hotplates allowed nanowire chemical sensors to operate at elevated temperatures in order to enhance the sensitivity of chemical sensors to target gases. By applying different currents through the platinum heating filament, we can easily vary the device temperature from room temperature to 350 degrees C. These nanosensors with integrated hot plates have been exploited for the detection of ethanol, CO, and hydrogen down to concentrations of 1, 10, and 50 ppm, respectively. (c) 2008 American Institute of Physics.

引用

页数：3

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