Novel integrated FBAR sensors: a universal technology platform for bio- and gas-detection

被引：53

作者：

Gabl, R ^{[1
]}

Green, E ^{[1
]}

Schreiter, M ^{[1
]}

Feucht, HD ^{[1
]}

Zeininger, H ^{[1
]}

Primig, R ^{[1
]}

Pitzer, D ^{[1
]}

Eckstein, G ^{[1
]}

Wersing, W ^{[1
]}

Reichl, W ^{[1
]}

Runck, J ^{[1
]}

机构：

[1] Siemens AG, Corp Technol, D-81739 Munich, Germany

来源：

PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2 | 2003年

关键词：

FBAR-sensor; gas-sensor; bio-sensor;

D O I：

10.1109/ICSENS.2003.1279132

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper the feasibility of thin film bulk acoustic resonators (FBAR), for applications in bio- and gas-detection, is shown for the first time. Solidly mounted, ZnO FBARs with frequencies around 2 GHz have been fabricated on silicon substrates. The dependence of the FBAR mass sensitivity on the design of the layer stack has been investigated exhibiting an optimized sensitivity of 2.5 Hz cm(2)/pg. Using a common protein assay the capability of detecting bio-molecules has successfully been proved Gas sensing has been demonstrated by coating the FBAR with a humidity absorbing polymer. A strong non-linear dependence of the humidity sensitivity on the thickness of the polymer coating has been found. When the polymer thickness is far less than the acoustic wavelength, a pure mass dependent response occurs, leading to a negative shift in resonance frequency. Moreover, as the polymer thickness becomes significant, acoustic influences affect the response and the shift becomes large and positive. A sensitivity to humidity of up to two orders of magnitude higher than that of comparably coated quartz crystal micro-balances has been observed.

引用

页码：1184 / 1188

页数：5

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