Formation and characterization of multiphase film properties of (Ti-Cr)N formed by cathodic arc deposition

A study of tribological properties resulting from a combination of titanium nitride and chromium nitride phases in thin films is reported here. Deposition of (Ti, Cr)N on M-50 steel substrates was performed in an industrial multi-source steered cathodic are deposition system. The nitrogen content of all films was maintained at about 49% by feed-back process control, Cr and Ti are sources were used to deposit thin films (1-2 mu m) onto a rotating substrate in a pressure regulated nitrogen gas background. Film properties (e.g, stoichiometry, microstructure, friction, wear, and hardness) are determined by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), ball-on-disk tribometer and nanoindentation. This study focuses on the wear behavior of these films at room temperature in atmospheric air. XRD data suggest that TiN, CrN and Cr2N are the two major phases present in these films, A region of Ti/Cr where a minimum friction and wear rate was observed. Scanning electron micrographs of the wear track of these mi?;ed phase films reveal plastic deformation of wear debris as the lending cause for this low friction. (C) 1998 Elsevier Science S.A. All rights reserved.