Electrochemical performance of diamond-like carbon thin films

被引:55
作者
Liu, E. [1 ]
Kwek, H. W. [1 ]
机构
[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore
关键词
diamond-like carbon; corrosion resistance; electrochemistry;
D O I
10.1016/j.tsf.2007.07.089
中图分类号
T [工业技术];
学科分类号
08 [工学];
摘要
Diamond-like carbon (DLC) thin films used in this study were intended for their electrochemical properties. The DLC films were deposited by a filtered cathodic vacuum arc (FCVA) process on p-type silicon (100) substrates biased at different pulse voltages (0-2000 V). The chemical bonding structures of the DLC films were characterized with micro-Raman spectroscopy and the electrochemical properties were evaluated by means of electrochemical impedance spectroscopy (EIS) and potentiodynamic polarization. The DLC films showed high impedance, high polarization resistance and high breakdown potential in a 0.5 M H2SO4 aqueous solution, which were attributed to the high SP3 content and uniformity of the films. The excellent chemical inertness of the DLC films made them promising corrosion resistant coating materials. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:5201 / 5205
页数:5
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