A miniaturized magnetic-field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry

被引：39

作者：

GottfriedGottfried, R

Budde, W

Jahne, R

Kuck, H

Sauer, B

Ulbricht, S

Wende, U

机构：

[1] Fraunhofer Inst. Microlectron. C., D-01109 Dresden

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期

关键词：

magnetic-field sensors; fluxgates; thin-film sensors; signal processing; CMOS; microsystems;

D O I：

10.1016/S0924-4247(97)80001-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on a miniaturized magnetic-field sensor system consisting of a fluxgate sensor fabricated in CMOS-compatible planar technology and a CMOS-ASIC for sensor supply, readout and signal processing using the second-harmonic principle with a feedback loop for zero-field operation. The system exhibits a sensitivity of 9.2 +/- 0.1 mV mu T-1 for a magnetic field range of +/- 90 mu T and a temperature range of 0 to 70 degrees C. The 3 dB bandwith is 300 Hz and a noise value of 30 nT Hz(-1/2) has been estimated. Using 5 V supply voltage, the power consumption of the system is measured to be 160 mW.

引用

页码：443 / 447

页数：5