Novel multibridge-structured piezoelectric microdevice for scanning force microscopy

被引:51
作者
Chu, J
Wang, Z
Maeda, R
Kataoka, K
Itoh, T
Suga, T
机构
[1] AIST, AIST, Mech Engn Lab, Tsukuba, Ibaraki 3058564, Japan
[2] Univ Tokyo, Adv Sci & Technol Res Ctr, Tokyo, Japan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2000年 / 18卷 / 06期
关键词
D O I
10.1116/1.1319684
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this article we report the structure and the microfabrication method of a novel micro-scanning force microscopy (SFM) device. It is a lead zirconate titanite (PZT) bimorph structure in the shape of a cantilever supported by bridges. Electric fields applied to the separated sections of the electrodes on the levers can induce lever deflection and actuate the tip in x, y, and z directions. The cantilever can vibrate and sense its own vibration amplitude to detect the surface topography in the cyclic contact SFM mode. In the fabrication process, the sol-gel method is modified for constructing high quality PZT films 3 mum thick. The single bridge device has shown microscopy sensitivity of 0.32 nA/nm in a vertical direction, with actuation sensitivities of 70-80 nm/V in a lateral direction. The multibridged structure has been proven to be effective in elevating the eigenfrequency, which is very important for improving the SPM data rate. (C) 2000 American Vacuum Society. [S0734-211X(00)06306-X].
引用
收藏
页码:3604 / 3607
页数:4
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