Reduced area specific resistance for iron-based metallic interconnects by surface oxide coatings

被引:87
作者
Huang, K
Hou, PY
Goodenough, JB
机构
[1] Univ Texas, Texas Mat Inst, Austin, TX 78713 USA
[2] Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
关键词
alloys; oxides; interfaces; thin films; electrical properties;
D O I
10.1016/S0025-5408(01)00506-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effects of various reactive-element coatings on the oxidation kinetics of two commercial iron-based alloys, Ebrite and ANSI 446, at elevated temperatures were investigated. Although NiO is not regarded as a reactive element oxide, it was chosen as a coating due to the enhanced conductivity of Cr2O3 by doping with NiO, Hot-dipping was used to make the desired coatings. The results consistently show a pronounced reduction in oxidation rate by either a Y2O3 coating or an equally mixed Y2O3/NiO double coating, particularly at low temperature, but only a slight influence by NiO coating. Examination of the scale microstructures revealed a continuous denser scale strongly bonded to the underlying metal for a Y2O3 coating, but visible micro-cracks for NiO coating. Electrical resistance measurements after a Y2O3 coating indicate a corresponding reduction in area specific resistance (ASR) with platinum and oxide electrodes, but an increase in ASR with oxide electrodes for a NiO coating. With a Y2O3/NiO double coating, a careful control of the NiO level in the scale has led to a denser, thinner and conducting Cr2O3 scale. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:81 / 95
页数:15
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