Amorphous lithium cobalt and nickel oxides thin films: preparation and characterization by RBS and PIGE

被引：25

作者：

Benqlilou-Moudden, H

Blondiaux, G

Vinatier, P

Levasseur, A

机构：

[1] CNRS, Inst Chim Mat Condensee Bordeaux, F-33402 Talence, France

[2] Ecole Natl Super Chim & Phys Bordeaux, F-33402 Talence, France

[3] CNRS, Ctr Etud & Rech Irradiat, F-45071 Orleans, France

来源：

THIN SOLID FILMS | 1998年 / 333卷 / 1-2期

关键词：

amorphous materials; cathodes; Rutherford backscattering spectroscopy; sputtering;

D O I：

10.1016/S0040-6090(98)00572-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films have been deposited by radio-frequency magnetron sputtering, using LiCoO2, LiNiO2 and LiNi0.7Co0.3O2 targets, in argon or Ar/O-2 gas mixture. The composition of the thin films has been determined by proton induced gamma-ray emission (PIGE) analysis and by Rutherford backscattering spectroscopy (RBS). The oxygen partial pressure in the plasma influences the composition of the thin films; these results an discussed with regard to the film morphology. (C) 1998 Elsevier Science S.A. Ail lights reserved.

引用

页码：16 / 19

页数：4

共 16 条

[1] RECHARGEABLE THIN-FILM LITHIUM BATTERIES [J].