Near-field optical readout for phase changed marks

被引：3

作者：

Nakano, T ^{[1
]}

Tominaga, J ^{[1
]}

Atoda, N ^{[1
]}

机构：

[1] Natl Inst Adv Interdisciplinary Res, Opt Memory Grp, Tsukuba, Ibaraki 3058562, Japan

来源：

FAR- AND NEAR-FIELD OPTICS: PHYSICS AND INFORMATION PROCESSING | 1998年 / 3467卷

关键词：

optical near-field; optical data storage; phase change film;

D O I：

10.1117/12.326828

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have observed near-field optical images of phase change marks and evaluated the readout signals including the optical near-field. Samples were composed of multilayered structures on glass substrates. Crystalline marks were recorded by a focused laser beam with an optical microscope in the as-deposited amorphous films. Ia readout, the optical and the topographical images of the recorded marks were evaluated at the same time by a collection mode near-field scanning optical microscope (NSON). The surface profiles showed less than 1 nm dips around the marks. Therefore, it means that the NSOM image of phase change marks depends on the refractive index change. The evaluated signal modulation of the optical images showed a sinusoidal curve to the top SiN layer thickness, and the maximum modulation was 60%.

引用

页码：268 / 273

页数：6

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