Precision machine tool X-Y stage utilizing a planar air bearing arrangement

被引：39

作者：

Erkorkmaz, K. ^{[1
]}

Gorniak, J. M. ^{[1
]}

Gordon, D. J. ^{[1
]}

机构：

[1] Univ Waterloo, Dept Mech & Mechatron Engn, Precis Controls Lab, Waterloo, ON N2L 3G1, Canada

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2010年 / 59卷 / 01期

基金：

加拿大创新基金会;

关键词：

Conceptual design; Metrology; Control;

D O I：

10.1016/j.cirp.2010.03.086

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents a new X-Y stage concept for precision machine tools. A large work area (300 mm x 300 mm) is achieved using a T-type gantry arrangement, which locates the work table supported on a vacuum preloaded air bearing on top of a reference granite surface. Actuation is provided with direct drives that fulfil the functions of motion controls, stiffness enhancement, and vibration damping. Thermal deformations are mitigated by designing internally cooled motor couplings. The error budget for the stage, as well as multivariable control law design and stability analysis, and metrology results are discussed in the paper. (C) 2010 CIRP.

引用

页码：425 / 428

页数：4

共 8 条

[1]

Altintas Y., 2009, ANN CIRP, V58, P335

[2]

BRECHER C, 2009, ANN CIRP, V58, P355

[3] Dynamics and control of the UNCC/MIT sub-atomic measuring machine [J].