FTIR and Vis-FUV real time spectroscopic ellipsometry studies of polymer surface modifications during ion beam bombardment

被引：28

作者：

Laskarakis, A ^{[1
]}

Gravalidis, C ^{[1
]}

Logothetidis, S ^{[1
]}

机构：

[1] Aristotle Univ Thessaloniki, Dept Phys, Solid State Phys Sect, GR-54124 Thessaloniki, Greece

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2004年 / 216卷

关键词：

spectroscopic ellipsometry; FTIR; Vis-FUV; polymer; plasma treatment;

D O I：

10.1016/j.nimb.2003.11.033

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The continuously increasing application of polymeric materials in many scientific and technological fields has motivated an extensive use of polymer surface treatments, which modify the physical and chemical properties of polymer surfaces leading to surface activation and promotion of the surface adhesion. Fourier transform IR spectroscopic ellipsometry (FTIRSE) and phase modulated ellipsometry (PME) in the IR and Vis-FUV spectral regions respectively have been employed for in situ and real time monitoring of the structural changes on the polymer surface obtained by Ar+ ion bombardment. The polymers were industrially supplied polyethylene tereplithalate (PET) and polyethylene naphthalate (PEN) membranes. The Ar+ ion bombardment has found to change the chemical bonding of the films and especially the amount of the C=O, C-C and C=C groups. The detailed study of the FTIRSE spectra reveals important information about the effect of the Ar+ ion bombardment on each of the above bonding groups. Also, the modification of the characteristic features, attributed to electronic transitions in specific bonds of PET and PEN macromolecules, has been studied using PME. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：131 / 136

页数：6

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